Thin Film Coater Beneq ACS 200 nFOG Aerosol Spray Deposition System 200mm Wafer

Description

Beneq ACS 200 nFOG Aerosol Coating System – Thin Film Deposition / R&D Lab Equipment Beneq ACS 200 Aerosol Coating System utilizing advanced nFOG™ wet coating technology for precision thin film deposition at atmospheric pressure. Designed for research & development, pilot-scale testing, and materials science applications , this system enables highly uniform coatings on a wide range of substrates including wafers, glass, polymers, and complex geometries. Key Features: nFOG aerosol-based wet coating technology Atmospheric pressure deposition (no vacuum required) Uniform thin film coatings (typically ±3% uniformity) Coating thickness range: ~10–500 nm Supports water-, alcohol-, and colloid-based precursor solutions Handles substrates up to 200 mm wafers Dual independent material feed system Fully automated coating process Enclosed system for operator safety Low material consumption / efficient sampling Technology Overview: The Beneq nFOG process generates a fine aerosol mist to deposit thin films without direct contact , allowing coating of sensitive, uneven, or temperature-sensitive substrates . This method offers a combination of: High uniformity Repeatability (no moving parts in deposition process) Flexibility across substrate shapes and sizes nFOG technology is widely used in: Thin film research Nanotechnology / nanomaterials Semiconductor and microelectronics R&D Optical coatings (anti-reflective, functional layers) Energy / solar coating development Surface functionalization and corrosion-resistant coatings Typical Applications: Spin-coating alternative for uniform films Coating of wafers, glass, polymers, and flexible substrates Functional coatings (optical, protective, conductive, barrier layers) Academic, university, and industrial R&D labs Condition: This Unit was only used a handful of times in a teaching environment at Oregon State University Included : Controller / software / PC Process chamber / enclosure Gas lines / tubing / accessories Manuals and documentation Palletized and ready to ship Keywords (for search visibility): Beneq ACS 200, nFOG coating system, aerosol coating system, thin film deposition, wet coating technology, lab coating equipment, nanocoating system, thin film coater, R&D coating system, wafer coating, atmospheric deposition system, materials science equipment, microelectronics coating, optical coating system, surface coating equipment